Estudio de los esfuerzos residuales en peliculas delgadas multicapas de TiN/ZrN y CrN/AlN utilizando la tecnica de difraccion de rayos X

Study of residual stress in TiN/ZrN and CrSin informacionlN multilayer thin films with several periods by means of X-ray diffraction technique Ceramic monolayer thin films present excellent mechanical properties, being an excellent choice to increase the service life of mechanical parts subjected to severe conditions, such as: corrosive environments, wear and high temperatures. In this manner, the study of metal/ceramic and ceramic/ceramic films is an active research topic. In this work, two multilayer ceramic/ceramic thin films will be studied in order to determine the residual stress level, which is a characteristic related to hardness, wear resistance and adhesion of the film to the substrate. This mechanical characterization is important because it allows adjustment of the deposition parameters of the film for a desired application. Calculations of residual stress will be done by means of the grazing x-ray diffraction technique.