Power supplies dedicated to the efficient control of the excimer lamps power

H. Piquet, R. Diez, V. Rueda

Producción: Capítulo del libro/informe/acta de congresoContribución a la conferenciarevisión exhaustiva

Resumen

Excimer lamps take place among the numerous industrial applications which rely on cold plasmas generated by means of Dielectric Barrier Discharges. For the performance and reliability of these applications, the control of the electrical energy injected into the plasma is of prominent importance; it also contributes to the homogeneity of the electrical discharge and to the amount of created excited species, thus the UV emission. In this scope, we have developed generations of pulsed current power supplies aimed at controlling the energy of the injected pulses. For UV generation processes by means of excimer lamps, the design approach of two of the most performing topologies is presented. The performances are highlighted, as well as the pitfalls and solutions for their use. The critical impact of the high voltage transformer, through its parasitic parameters, is pointed out, as well as solutions trying to take advantage of them.

Idioma originalInglés
Título de la publicación alojadaXIV International Conference on Pulsed Lasers and Laser Applications
EditoresVictor F. Tarasenko, Anton V. Klimkin, Maxim V. Trigub
EditorialSPIE
ISBN (versión digital)9781510634114
DOI
EstadoPublicada - 2019
EventoXIV International Conference on Pulsed Lasers and Laser Applications, AMPL 2019 - Tomsk, Rusia
Duración: 15 sep. 201920 sep. 2019

Serie de la publicación

NombreProceedings of SPIE - The International Society for Optical Engineering
Volumen11322
ISSN (versión impresa)0277-786X
ISSN (versión digital)1996-756X

Conferencia

ConferenciaXIV International Conference on Pulsed Lasers and Laser Applications, AMPL 2019
País/TerritorioRusia
CiudadTomsk
Período15/09/1920/09/19

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