Microstructure, residual stress and hardness study of nanocrystalline titanium-zirconium nitride thin films

Material Science

• Titanium 100%
• Diffraction Pattern 100%
• Nanocrystalline 100%
• Nitride Compound 100%
• Zirconium 100%
• X Ray Powder Diffraction 100%
• Residual Stress 100%
• Thin Films 100%
• Atomic Force Microscopy 50%
• Crystallite Size 50%
• Young's Modulus 50%
• Grain Size 50%
• Cathodic Arc Deposition 50%
• Nanohardness 50%
• Microstructural Analysis 50%
• Nanoindentation 50%
• Morphology 50%

INIS

• thin films 100%
• residual stresses 100%
• microstructure 100%
• hardness 100%
• titanium 100%
• zirconium nitrides 100%
• deposition 66%
• x-ray diffraction 66%
• substrates 66%
• information 33%
• synthesis 33%
• values 33%
• size 33%
• atomic force microscopy 33%
• grain size 33%
• young modulus 33%

Keyphrases

• Titanium Zirconium Nitride 100%
• Nanocrystalline Titanium 100%
• X-ray Powder Pattern 100%
• Hardness Studies 100%
• Property Relations 50%
• Grain Size Evolution 50%
• Cathodic Arc Deposition 50%
• Nanoindentation Measurement 50%
• Residual Stress State 50%
• Different Substrate Temperature 50%
• Poisson Coefficient 50%
• Microstrain 50%
• Microstructural Analysis 50%