Power supplies dedicated to the efficient control of the excimer lamps power

H. Piquet, R. Diez, V. Rueda

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Excimer lamps take place among the numerous industrial applications which rely on cold plasmas generated by means of Dielectric Barrier Discharges. For the performance and reliability of these applications, the control of the electrical energy injected into the plasma is of prominent importance; it also contributes to the homogeneity of the electrical discharge and to the amount of created excited species, thus the UV emission. In this scope, we have developed generations of pulsed current power supplies aimed at controlling the energy of the injected pulses. For UV generation processes by means of excimer lamps, the design approach of two of the most performing topologies is presented. The performances are highlighted, as well as the pitfalls and solutions for their use. The critical impact of the high voltage transformer, through its parasitic parameters, is pointed out, as well as solutions trying to take advantage of them.

Original languageEnglish
Title of host publicationXIV International Conference on Pulsed Lasers and Laser Applications
EditorsVictor F. Tarasenko, Anton V. Klimkin, Maxim V. Trigub
PublisherSPIE
ISBN (Electronic)9781510634114
DOIs
StatePublished - 2019
EventXIV International Conference on Pulsed Lasers and Laser Applications, AMPL 2019 - Tomsk, Russian Federation
Duration: 15 Sep 201920 Sep 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11322
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceXIV International Conference on Pulsed Lasers and Laser Applications, AMPL 2019
Country/TerritoryRussian Federation
CityTomsk
Period15/09/1920/09/19

Keywords

  • Current source
  • Dielectric Barrier Discharges
  • Excimer lamps
  • Power control
  • Power supply
  • UV emission

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