Innovative power supply concepts for DBD excilamps

Hubert Piquet, Sounil Bhosle, Rafael Diez, Areski Toumi, Georges Zissis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

Excimer and exciplex UV/VUV sources excited by Dielectric Barrier Discharges represent a promising technology for industrial applications where powerful and efficient UV sources are needed. According to previous work, the most suited power supply waveform for coaxial DBD Excilamps is a unipolar pulsed voltage excitation of some kilovolts at some hundred of kilohertz with a duty cycle around one percent. We present here new concepts for energy supplying of coaxial DBDs, based on the direct control of the current in the lamps. These concepts have been tested by means of simulation models developed in our department and the time evolution of the UV radiation is presented for various considered current waveforms. Based on these results, a power supply topology has been designed for an efficient power transfer to the Excilamp. It is based on a converter which controls the current flowing through the DBD. The results concerning the coupling of this converter with a DBD load are commented.

Original languageEnglish
Title of host publicationAtomic and Molecular Pulsed Lasers VII
DOIs
StatePublished - 2008
Externally publishedYes
Event8th International Conference Atomic and Molecular Pulsed Lasers, AMPL-2007 - Tomsk, Russian Federation
Duration: 10 Sep 200714 Sep 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6938
ISSN (Print)0277-786X

Conference

Conference8th International Conference Atomic and Molecular Pulsed Lasers, AMPL-2007
Country/TerritoryRussian Federation
CityTomsk
Period10/09/0714/09/07

Keywords

  • Current-mode
  • DBD
  • Excimer
  • Power supply
  • Static converter

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